A new actuation scheme to enhance the linear momentum of MEMS inertia sensors

10.1016/j.sna.2004.10.018

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Bibliographic Details
Main Authors: Zhao, T., Liang, Y.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54482
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Institution: National University of Singapore