A new actuation scheme to enhance the linear momentum of MEMS inertia sensors
10.1016/j.sna.2004.10.018
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Main Authors: | Zhao, T., Liang, Y.C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/54482 |
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Institution: | National University of Singapore |
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