A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering

A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering

Optik (Jena)

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Bibliographic Details
Main Authors: Tay, C.J., Quan, C.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Laser diode
Laser scattering
Semi-conductor wafers
Surface roughness
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54691
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Institution: National University of Singapore
Description
Summary:Optik (Jena)

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