A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering

Optik (Jena)

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Bibliographic Details
Main Authors:	Tay, C.J., Quan, C.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Laser diode Laser scattering Semi-conductor wafers Surface roughness
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54691
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54691
record_format	dspace
spelling	sg-nus-scholar.10635-546912024-11-13T04:23:32Z A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering Tay, C.J. Quan, C. MECHANICAL ENGINEERING Laser diode Laser scattering Semi-conductor wafers Surface roughness Optik (Jena) 114 1 1-6 OTIKA 2014-06-16T09:33:46Z 2014-06-16T09:33:46Z 2003 Article Tay, C.J.,Quan, C. (2003). A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering. Optik (Jena) 114 (1) : 1-6. ScholarBank@NUS Repository. 00304026 http://scholarbank.nus.edu.sg/handle/10635/54691 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Laser diode Laser scattering Semi-conductor wafers Surface roughness
spellingShingle	Laser diode Laser scattering Semi-conductor wafers Surface roughness Tay, C.J. Quan, C. A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering
description	Optik (Jena)
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, C.J. Quan, C.
format	Article
author	Tay, C.J. Quan, C.
author_sort	Tay, C.J.
title	A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering
title_short	A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering
title_full	A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering
title_fullStr	A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering
title_full_unstemmed	A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering
title_sort	parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54691
_version_	1821184831879380992

A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering

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