A robust focusing and astigmatism correction method for the scanning electron microscope

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Main Authors:	Ong, K.H., Phang, J.C.H., Thong, J.T.L.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Astigmatism correction Automation Focusing Fourier transforms Scanning electron microscopy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54791
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54791
record_format	dspace
spelling	sg-nus-scholar.10635-547912015-01-06T20:12:11Z A robust focusing and astigmatism correction method for the scanning electron microscope Ong, K.H. Phang, J.C.H. Thong, J.T.L. ELECTRICAL ENGINEERING Astigmatism correction Automation Focusing Fourier transforms Scanning electron microscopy Scanning 19 8 553-563 SCNND 2014-06-16T09:34:51Z 2014-06-16T09:34:51Z 1997-11 Article Ong, K.H.,Phang, J.C.H.,Thong, J.T.L. (1997-11). A robust focusing and astigmatism correction method for the scanning electron microscope. Scanning 19 (8) : 553-563. ScholarBank@NUS Repository. 01610457 http://scholarbank.nus.edu.sg/handle/10635/54791 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Astigmatism correction Automation Focusing Fourier transforms Scanning electron microscopy
spellingShingle	Astigmatism correction Automation Focusing Fourier transforms Scanning electron microscopy Ong, K.H. Phang, J.C.H. Thong, J.T.L. A robust focusing and astigmatism correction method for the scanning electron microscope
description	Scanning
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Ong, K.H. Phang, J.C.H. Thong, J.T.L.
format	Article
author	Ong, K.H. Phang, J.C.H. Thong, J.T.L.
author_sort	Ong, K.H.
title	A robust focusing and astigmatism correction method for the scanning electron microscope
title_short	A robust focusing and astigmatism correction method for the scanning electron microscope
title_full	A robust focusing and astigmatism correction method for the scanning electron microscope
title_fullStr	A robust focusing and astigmatism correction method for the scanning electron microscope
title_full_unstemmed	A robust focusing and astigmatism correction method for the scanning electron microscope
title_sort	robust focusing and astigmatism correction method for the scanning electron microscope
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54791
_version_	1681084379393163264

A robust focusing and astigmatism correction method for the scanning electron microscope

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