A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique

A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique

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Bibliographic Details
Main Authors: Ong, K.H., Phang, J.C.H., Thong, J.T.L.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Astigmatism correction
Automation
Focusing
Fourier transform
Scanning electron microscopy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54793
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-547932024-11-13T12:53:54Z A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique Ong, K.H. Phang, J.C.H. Thong, J.T.L. ELECTRICAL ENGINEERING Astigmatism correction Automation Focusing Fourier transform Scanning electron microscopy Scanning 20 5 357-375 SCNND 2014-06-16T09:34:52Z 2014-06-16T09:34:52Z 1998-08 Article Ong, K.H.,Phang, J.C.H.,Thong, J.T.L. (1998-08). A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique. Scanning 20 (5) : 357-375. ScholarBank@NUS Repository. 01610457 http://scholarbank.nus.edu.sg/handle/10635/54793 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Astigmatism correction
Automation
Focusing
Fourier transform
Scanning electron microscopy
spellingShingle Astigmatism correction
Automation
Focusing
Fourier transform
Scanning electron microscopy
Ong, K.H.
Phang, J.C.H.
Thong, J.T.L.
A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique
description Scanning
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Ong, K.H.
Phang, J.C.H.
Thong, J.T.L.
format Article
author Ong, K.H.
Phang, J.C.H.
Thong, J.T.L.
author_sort Ong, K.H.
title A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique
title_short A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique
title_full A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique
title_fullStr A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique
title_full_unstemmed A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique
title_sort robust focusing and astigmatism correction method for the scanning electron microscope - part iii: an improved technique
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/54793
_version_ 1821190359448813568

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