A spectroscopic scanning electron microscope design

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Main Authors:	Khursheed, A., Osterberg, M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Auger electrons Backscattered electrons Cathodoluminescence detectors Energy-dispersive/wavelength dispersive x-ray spectrometer Magnetic sector plates Mixed immersion objective lenses Scanning electron microscopy Secondary electrons
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54823
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54823
record_format	dspace
spelling	sg-nus-scholar.10635-548232015-01-07T08:06:24Z A spectroscopic scanning electron microscope design Khursheed, A. Osterberg, M. ELECTRICAL & COMPUTER ENGINEERING Auger electrons Backscattered electrons Cathodoluminescence detectors Energy-dispersive/wavelength dispersive x-ray spectrometer Magnetic sector plates Mixed immersion objective lenses Scanning electron microscopy Secondary electrons Scanning 26 6 296-306 SCNND 2014-06-17T02:35:56Z 2014-06-17T02:35:56Z 2004-11 Article Khursheed, A.,Osterberg, M. (2004-11). A spectroscopic scanning electron microscope design. Scanning 26 (6) : 296-306. ScholarBank@NUS Repository. 01610457 http://scholarbank.nus.edu.sg/handle/10635/54823 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Auger electrons Backscattered electrons Cathodoluminescence detectors Energy-dispersive/wavelength dispersive x-ray spectrometer Magnetic sector plates Mixed immersion objective lenses Scanning electron microscopy Secondary electrons
spellingShingle	Auger electrons Backscattered electrons Cathodoluminescence detectors Energy-dispersive/wavelength dispersive x-ray spectrometer Magnetic sector plates Mixed immersion objective lenses Scanning electron microscopy Secondary electrons Khursheed, A. Osterberg, M. A spectroscopic scanning electron microscope design
description	Scanning
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Khursheed, A. Osterberg, M.
format	Article
author	Khursheed, A. Osterberg, M.
author_sort	Khursheed, A.
title	A spectroscopic scanning electron microscope design
title_short	A spectroscopic scanning electron microscope design
title_full	A spectroscopic scanning electron microscope design
title_fullStr	A spectroscopic scanning electron microscope design
title_full_unstemmed	A spectroscopic scanning electron microscope design
title_sort	spectroscopic scanning electron microscope design
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54823
_version_	1681084385343832064

A spectroscopic scanning electron microscope design

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