Acoustic phonon characterisation of fixed-fixed beam MEMS switch

10.1049/el.2009.3691

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Bibliographic Details
Main Authors:	Annamalai, M., Palaniapan, M., Wong, W.-K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54876
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Institution:	National University of Singapore

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Summary:	10.1049/el.2009.3691

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