An in-situ temperature measurement system for DUV lithography
10.1109/TIM.2003.815987
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sg-nus-scholar.10635-550342023-10-27T09:24:31Z An in-situ temperature measurement system for DUV lithography Tan, W.W. Li, R.F.Y. ELECTRICAL & COMPUTER ENGINEERING In-situ temperature measurement LCSR test Measurement accuracy Out-of-contact fault Post-exposure bake 10.1109/TIM.2003.815987 IEEE Transactions on Instrumentation and Measurement 52 4 1136-1142 IEIMA 2014-06-17T02:38:24Z 2014-06-17T02:38:24Z 2003-08 Article Tan, W.W., Li, R.F.Y. (2003-08). An in-situ temperature measurement system for DUV lithography. IEEE Transactions on Instrumentation and Measurement 52 (4) : 1136-1142. ScholarBank@NUS Repository. https://doi.org/10.1109/TIM.2003.815987 00189456 http://scholarbank.nus.edu.sg/handle/10635/55034 000185419800024 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
In-situ temperature measurement LCSR test Measurement accuracy Out-of-contact fault Post-exposure bake |
| spellingShingle |
In-situ temperature measurement LCSR test Measurement accuracy Out-of-contact fault Post-exposure bake Tan, W.W. Li, R.F.Y. An in-situ temperature measurement system for DUV lithography |
| description |
10.1109/TIM.2003.815987 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tan, W.W. Li, R.F.Y. |
| format |
Article |
| author |
Tan, W.W. Li, R.F.Y. |
| author_sort |
Tan, W.W. |
| title |
An in-situ temperature measurement system for DUV lithography |
| title_short |
An in-situ temperature measurement system for DUV lithography |
| title_full |
An in-situ temperature measurement system for DUV lithography |
| title_fullStr |
An in-situ temperature measurement system for DUV lithography |
| title_full_unstemmed |
An in-situ temperature measurement system for DUV lithography |
| title_sort |
in-situ temperature measurement system for duv lithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55034 |
| _version_ |
1781412063074058240 |