Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

10.1016/S0169-4332(01)00391-9

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Bibliographic Details
Main Authors:	Wang, H., Lin, J., Huan, C.H.A., Dong, P., He, J., Tang, S.H., Eng, W.K., Thong, T.L.J.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Carbon nanotubes Lithography Pattern PE-CVD SEM
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55424
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55424
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spelling	sg-nus-scholar.10635-554242023-10-25T21:33:55Z Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition Wang, H. Lin, J. Huan, C.H.A. Dong, P. He, J. Tang, S.H. Eng, W.K. Thong, T.L.J. PHYSICS ELECTRICAL & COMPUTER ENGINEERING Carbon nanotubes Lithography Pattern PE-CVD SEM 10.1016/S0169-4332(01)00391-9 Applied Surface Science 181 3-4 248-254 ASUSE 2014-06-17T02:42:55Z 2014-06-17T02:42:55Z 2001-09-21 Article Wang, H., Lin, J., Huan, C.H.A., Dong, P., He, J., Tang, S.H., Eng, W.K., Thong, T.L.J. (2001-09-21). Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition. Applied Surface Science 181 (3-4) : 248-254. ScholarBank@NUS Repository. https://doi.org/10.1016/S0169-4332(01)00391-9 01694332 http://scholarbank.nus.edu.sg/handle/10635/55424 000171404000010 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Carbon nanotubes Lithography Pattern PE-CVD SEM
spellingShingle	Carbon nanotubes Lithography Pattern PE-CVD SEM Wang, H. Lin, J. Huan, C.H.A. Dong, P. He, J. Tang, S.H. Eng, W.K. Thong, T.L.J. Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
description	10.1016/S0169-4332(01)00391-9
author2	PHYSICS
author_facet	PHYSICS Wang, H. Lin, J. Huan, C.H.A. Dong, P. He, J. Tang, S.H. Eng, W.K. Thong, T.L.J.
format	Article
author	Wang, H. Lin, J. Huan, C.H.A. Dong, P. He, J. Tang, S.H. Eng, W.K. Thong, T.L.J.
author_sort	Wang, H.
title	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_short	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_full	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_fullStr	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_full_unstemmed	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_sort	controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55424
_version_	1781412126718427136

Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

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