Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

10.1016/S0169-4332(01)00391-9

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Bibliographic Details
Main Authors: Wang, H., Lin, J., Huan, C.H.A., Dong, P., He, J., Tang, S.H., Eng, W.K., Thong, T.L.J.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Carbon nanotubes
Lithography
Pattern
PE-CVD
SEM
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55424
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Institution: National University of Singapore

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