Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

10.1016/S0169-4332(01)00391-9

Saved in:

書目詳細資料
Main Authors:	Wang, H., Lin, J., Huan, C.H.A., Dong, P., He, J., Tang, S.H., Eng, W.K., Thong, T.L.J.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Article
出版:	2014
主題:	Carbon nanotubes Lithography Pattern PE-CVD SEM
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/55424
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

id	sg-nus-scholar.10635-55424
record_format	dspace
spelling	sg-nus-scholar.10635-554242024-11-13T13:30:28Z Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition Wang, H. Lin, J. Huan, C.H.A. Dong, P. He, J. Tang, S.H. Eng, W.K. Thong, T.L.J. ELECTRICAL & COMPUTER ENGINEERING PHYSICS Carbon nanotubes Lithography Pattern PE-CVD SEM 10.1016/S0169-4332(01)00391-9 Applied Surface Science 181 3-4 248-254 ASUSE 2014-06-17T02:42:55Z 2014-06-17T02:42:55Z 2001-09-21 Article Wang, H., Lin, J., Huan, C.H.A., Dong, P., He, J., Tang, S.H., Eng, W.K., Thong, T.L.J. (2001-09-21). Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition. Applied Surface Science 181 (3-4) : 248-254. ScholarBank@NUS Repository. https://doi.org/10.1016/S0169-4332(01)00391-9 01694332 http://scholarbank.nus.edu.sg/handle/10635/55424 000171404000010 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Carbon nanotubes Lithography Pattern PE-CVD SEM
spellingShingle	Carbon nanotubes Lithography Pattern PE-CVD SEM Wang, H. Lin, J. Huan, C.H.A. Dong, P. He, J. Tang, S.H. Eng, W.K. Thong, T.L.J. Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
description	10.1016/S0169-4332(01)00391-9
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, H. Lin, J. Huan, C.H.A. Dong, P. He, J. Tang, S.H. Eng, W.K. Thong, T.L.J.
format	Article
author	Wang, H. Lin, J. Huan, C.H.A. Dong, P. He, J. Tang, S.H. Eng, W.K. Thong, T.L.J.
author_sort	Wang, H.
title	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_short	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_full	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_fullStr	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_full_unstemmed	Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
title_sort	controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55424
_version_	1821206987437768704

Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

相似書籍