Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques

Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques

10.1063/1.3070612

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Bibliographic Details
Main Authors: Goh, S.H., Sheppard, C.J.R., Quah, A.C.T., Chua, C.M., Koh, L.S., Phang, J.C.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55557
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/55557

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