Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques
10.1063/1.3070612
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2014
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sg-nus-scholar.10635-555572024-11-13T12:53:53Z Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques Goh, S.H. Sheppard, C.J.R. Quah, A.C.T. Chua, C.M. Koh, L.S. Phang, J.C.H. ELECTRICAL & COMPUTER ENGINEERING BIOENGINEERING 10.1063/1.3070612 Review of Scientific Instruments 80 1 - RSINA 2014-06-17T02:44:27Z 2014-06-17T02:44:27Z 2009 Article Goh, S.H., Sheppard, C.J.R., Quah, A.C.T., Chua, C.M., Koh, L.S., Phang, J.C.H. (2009). Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques. Review of Scientific Instruments 80 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3070612 00346748 http://scholarbank.nus.edu.sg/handle/10635/55557 000262966000015 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.3070612 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Goh, S.H. Sheppard, C.J.R. Quah, A.C.T. Chua, C.M. Koh, L.S. Phang, J.C.H. |
| format |
Article |
| author |
Goh, S.H. Sheppard, C.J.R. Quah, A.C.T. Chua, C.M. Koh, L.S. Phang, J.C.H. |
| spellingShingle |
Goh, S.H. Sheppard, C.J.R. Quah, A.C.T. Chua, C.M. Koh, L.S. Phang, J.C.H. Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques |
| author_sort |
Goh, S.H. |
| title |
Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques |
| title_short |
Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques |
| title_full |
Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques |
| title_fullStr |
Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques |
| title_full_unstemmed |
Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques |
| title_sort |
design considerations for refractive solid immersion lens: application to subsurface integrated circuit fault localization using laser induced techniques |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55557 |
| _version_ |
1821194174995628032 |