Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques
10.1063/1.3070612
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Main Authors: | Goh, S.H., Sheppard, C.J.R., Quah, A.C.T., Chua, C.M., Koh, L.S., Phang, J.C.H. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55557 |
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Institution: | National University of Singapore |
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