Design of a parallel mass spectrometer for focused ion beam columns

10.1116/1.3497021

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Bibliographic Details
Main Authors:	Khursheed, A., Cheong, K.H., Hoang, H.Q.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55568
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55568
record_format	dspace
spelling	sg-nus-scholar.10635-555682024-11-11T01:22:09Z Design of a parallel mass spectrometer for focused ion beam columns Khursheed, A. Cheong, K.H. Hoang, H.Q. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.3497021 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 28 6 C6F10-C6F14 JVTBD 2014-06-17T02:44:34Z 2014-06-17T02:44:34Z 2010-11 Article Khursheed, A., Cheong, K.H., Hoang, H.Q. (2010-11). Design of a parallel mass spectrometer for focused ion beam columns. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 28 (6) : C6F10-C6F14. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3497021 10711023 http://scholarbank.nus.edu.sg/handle/10635/55568 000285015200031 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.3497021
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Khursheed, A. Cheong, K.H. Hoang, H.Q.
format	Article
author	Khursheed, A. Cheong, K.H. Hoang, H.Q.
spellingShingle	Khursheed, A. Cheong, K.H. Hoang, H.Q. Design of a parallel mass spectrometer for focused ion beam columns
author_sort	Khursheed, A.
title	Design of a parallel mass spectrometer for focused ion beam columns
title_short	Design of a parallel mass spectrometer for focused ion beam columns
title_full	Design of a parallel mass spectrometer for focused ion beam columns
title_fullStr	Design of a parallel mass spectrometer for focused ion beam columns
title_full_unstemmed	Design of a parallel mass spectrometer for focused ion beam columns
title_sort	design of a parallel mass spectrometer for focused ion beam columns
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55568
_version_	1821210916218208256

Design of a parallel mass spectrometer for focused ion beam columns

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