Design of a parallel mass spectrometer for focused ion beam columns
10.1116/1.3497021
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Main Authors: | Khursheed, A., Cheong, K.H., Hoang, H.Q. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55568 |
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Institution: | National University of Singapore |
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