Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems

10.1016/j.mechatronics.2009.03.005

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Bibliographic Details
Main Authors:	Pang, C.K., Lu, Y., Li, C., Chen, J., Zhu, H., Yang, J., Mou, J., Guo, G., Chen, B.M., Lee, T.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	MEMS Probe-based storage systems Self-sensing actuation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55591
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55591
record_format	dspace
spelling	sg-nus-scholar.10635-555912023-10-30T08:10:45Z Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems Pang, C.K. Lu, Y. Li, C. Chen, J. Zhu, H. Yang, J. Mou, J. Guo, G. Chen, B.M. Lee, T.H. ELECTRICAL & COMPUTER ENGINEERING MEMS Probe-based storage systems Self-sensing actuation 10.1016/j.mechatronics.2009.03.005 Mechatronics 19 7 1158-1168 MECHE 2014-06-17T02:44:50Z 2014-06-17T02:44:50Z 2009-10 Article Pang, C.K., Lu, Y., Li, C., Chen, J., Zhu, H., Yang, J., Mou, J., Guo, G., Chen, B.M., Lee, T.H. (2009-10). Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems. Mechatronics 19 (7) : 1158-1168. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mechatronics.2009.03.005 09574158 http://scholarbank.nus.edu.sg/handle/10635/55591 000271965100013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	MEMS Probe-based storage systems Self-sensing actuation
spellingShingle	MEMS Probe-based storage systems Self-sensing actuation Pang, C.K. Lu, Y. Li, C. Chen, J. Zhu, H. Yang, J. Mou, J. Guo, G. Chen, B.M. Lee, T.H. Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems
description	10.1016/j.mechatronics.2009.03.005
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Pang, C.K. Lu, Y. Li, C. Chen, J. Zhu, H. Yang, J. Mou, J. Guo, G. Chen, B.M. Lee, T.H.
format	Article
author	Pang, C.K. Lu, Y. Li, C. Chen, J. Zhu, H. Yang, J. Mou, J. Guo, G. Chen, B.M. Lee, T.H.
author_sort	Pang, C.K.
title	Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems
title_short	Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems
title_full	Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems
title_fullStr	Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems
title_full_unstemmed	Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems
title_sort	design, fabrication, sensor fusion, and control of a micro x-y stage media platform for probe-based storage systems
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55591
_version_	1781412155312046080

Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems

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