Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems

Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems

10.1016/j.mechatronics.2009.03.005

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Bibliographic Details
Main Authors: Pang, C.K., Lu, Y., Li, C., Chen, J., Zhu, H., Yang, J., Mou, J., Guo, G., Chen, B.M., Lee, T.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
MEMS
Probe-based storage systems
Self-sensing actuation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55591
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Institution: National University of Singapore

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