Dynamic chromatic aberration correction in low energy electron microscopes
10.1116/1.2062432
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55716 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-55716 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-557162023-10-29T22:49:42Z Dynamic chromatic aberration correction in low energy electron microscopes Khursheed, A. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2062432 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 6 2749-2753 JVTBD 2014-06-17T02:46:18Z 2014-06-17T02:46:18Z 2005-11 Article Khursheed, A. (2005-11). Dynamic chromatic aberration correction in low energy electron microscopes. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (6) : 2749-2753. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2062432 10711023 http://scholarbank.nus.edu.sg/handle/10635/55716 000234613200090 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1116/1.2062432 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Khursheed, A. |
| format |
Article |
| author |
Khursheed, A. |
| spellingShingle |
Khursheed, A. Dynamic chromatic aberration correction in low energy electron microscopes |
| author_sort |
Khursheed, A. |
| title |
Dynamic chromatic aberration correction in low energy electron microscopes |
| title_short |
Dynamic chromatic aberration correction in low energy electron microscopes |
| title_full |
Dynamic chromatic aberration correction in low energy electron microscopes |
| title_fullStr |
Dynamic chromatic aberration correction in low energy electron microscopes |
| title_full_unstemmed |
Dynamic chromatic aberration correction in low energy electron microscopes |
| title_sort |
dynamic chromatic aberration correction in low energy electron microscopes |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55716 |
| _version_ |
1781412178225528832 |