Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope

Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope

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Main Authors: Thong, J.T.L., Wong, W.K., Zainal, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55758
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-557582015-01-21T18:39:29Z Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope Thong, J.T.L. Wong, W.K. Zainal, A. ELECTRICAL & COMPUTER ENGINEERING Scanning 23 2 113-114 SCNND 2014-06-17T02:46:47Z 2014-06-17T02:46:47Z 2001 Article Thong, J.T.L.,Wong, W.K.,Zainal, A. (2001). Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope. Scanning 23 (2) : 113-114. ScholarBank@NUS Repository. 01610457 http://scholarbank.nus.edu.sg/handle/10635/55758 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Scanning
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Thong, J.T.L.
Wong, W.K.
Zainal, A.
format Article
author Thong, J.T.L.
Wong, W.K.
Zainal, A.
spellingShingle Thong, J.T.L.
Wong, W.K.
Zainal, A.
Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope
author_sort Thong, J.T.L.
title Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope
title_short Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope
title_full Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope
title_fullStr Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope
title_full_unstemmed Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope
title_sort effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/55758
_version_ 1681084557532594176

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