Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope
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Main Authors: | Thong, J.T.L., Wong, W.K., Zainal, A. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55758 |
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Institution: | National University of Singapore |
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