Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering

10.1063/1.2798868

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Main Authors: Liu, H.F., Chua, S.J., Hu, G.X., Gong, H., Xiang, N.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55780
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-557802023-10-25T22:58:56Z Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering Liu, H.F. Chua, S.J. Hu, G.X. Gong, H. Xiang, N. MATERIALS SCIENCE AND ENGINEERING ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2798868 Journal of Applied Physics 102 8 - JAPIA 2014-06-17T02:47:02Z 2014-06-17T02:47:02Z 2007 Article Liu, H.F., Chua, S.J., Hu, G.X., Gong, H., Xiang, N. (2007). Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering. Journal of Applied Physics 102 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2798868 00218979 http://scholarbank.nus.edu.sg/handle/10635/55780 000250589300046 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.2798868
author2 MATERIALS SCIENCE AND ENGINEERING
author_facet MATERIALS SCIENCE AND ENGINEERING
Liu, H.F.
Chua, S.J.
Hu, G.X.
Gong, H.
Xiang, N.
format Article
author Liu, H.F.
Chua, S.J.
Hu, G.X.
Gong, H.
Xiang, N.
spellingShingle Liu, H.F.
Chua, S.J.
Hu, G.X.
Gong, H.
Xiang, N.
Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering
author_sort Liu, H.F.
title Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering
title_short Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering
title_full Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering
title_fullStr Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering
title_full_unstemmed Effects of substrate on the structure and orientation of ZnO thin film grown by rf-magnetron sputtering
title_sort effects of substrate on the structure and orientation of zno thin film grown by rf-magnetron sputtering
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/55780
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