Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition

10.1116/1.2731332

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Main Authors: Liu, C., Chor, E.F., Tan, L.S., Du, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55902
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-559022023-10-27T07:02:52Z Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition Liu, C. Chor, E.F. Tan, L.S. Du, A. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2731332 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 3 754-759 JVTBD 2014-06-17T02:48:26Z 2014-06-17T02:48:26Z 2007 Article Liu, C., Chor, E.F., Tan, L.S., Du, A. (2007). Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 (3) : 754-759. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2731332 10711023 http://scholarbank.nus.edu.sg/handle/10635/55902 000247551300015 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1116/1.2731332
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Liu, C.
Chor, E.F.
Tan, L.S.
Du, A.
format Article
author Liu, C.
Chor, E.F.
Tan, L.S.
Du, A.
spellingShingle Liu, C.
Chor, E.F.
Tan, L.S.
Du, A.
Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition
author_sort Liu, C.
title Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition
title_short Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition
title_full Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition
title_fullStr Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition
title_full_unstemmed Epitaxial growth of Sc2 O3 films on GaN (0001) by pulsed laser deposition
title_sort epitaxial growth of sc2 o3 films on gan (0001) by pulsed laser deposition
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/55902
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