Evolution of hillocks during silicon etching in TMAH
10.1088/0960-1317/11/1/310
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2014
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sg-nus-scholar.10635-559222023-08-10T08:00:41Z Evolution of hillocks during silicon etching in TMAH Thong, J.T.L. Luo, P. Choi, W.K. Tan, S.C. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/11/1/310 Journal of Micromechanics and Microengineering 11 1 61-69 JMMIE 2014-06-17T02:48:39Z 2014-06-17T02:48:39Z 2001-01 Article Thong, J.T.L., Luo, P., Choi, W.K., Tan, S.C. (2001-01). Evolution of hillocks during silicon etching in TMAH. Journal of Micromechanics and Microengineering 11 (1) : 61-69. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/11/1/310 09601317 http://scholarbank.nus.edu.sg/handle/10635/55922 000166561500010 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
10.1088/0960-1317/11/1/310 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Thong, J.T.L. Luo, P. Choi, W.K. Tan, S.C. |
| format |
Article |
| author |
Thong, J.T.L. Luo, P. Choi, W.K. Tan, S.C. |
| spellingShingle |
Thong, J.T.L. Luo, P. Choi, W.K. Tan, S.C. Evolution of hillocks during silicon etching in TMAH |
| author_sort |
Thong, J.T.L. |
| title |
Evolution of hillocks during silicon etching in TMAH |
| title_short |
Evolution of hillocks during silicon etching in TMAH |
| title_full |
Evolution of hillocks during silicon etching in TMAH |
| title_fullStr |
Evolution of hillocks during silicon etching in TMAH |
| title_full_unstemmed |
Evolution of hillocks during silicon etching in TMAH |
| title_sort |
evolution of hillocks during silicon etching in tmah |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55922 |
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1775627148908822528 |