Evolution of hillocks during silicon etching in TMAH

10.1088/0960-1317/11/1/310

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Bibliographic Details
Main Authors:	Thong, J.T.L., Luo, P., Choi, W.K., Tan, S.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55922
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Institution:	National University of Singapore

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