Fabrication of large-area ultra-thin single crystal silicon membranes

Fabrication of large-area ultra-thin single crystal silicon membranes

10.1063/1.3665620

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Bibliographic Details
Main Authors: Dang, Z.Y., Motapothula, M., Ow, Y.S., Venkatesan, T., Breese, M.B.H., Rana, M.A., Osman, A.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55987
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Institution: National University of Singapore
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Summary:10.1063/1.3665620

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