Fabrication of large-area ultra-thin single crystal silicon membranes
10.1063/1.3665620
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Main Authors: | Dang, Z.Y., Motapothula, M., Ow, Y.S., Venkatesan, T., Breese, M.B.H., Rana, M.A., Osman, A. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55987 |
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Institution: | National University of Singapore |
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