Fabrication of large-area ultra-thin single crystal silicon membranes

10.1063/1.3665620

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Bibliographic Details
Main Authors:	Dang, Z.Y., Motapothula, M., Ow, Y.S., Venkatesan, T., Breese, M.B.H., Rana, M.A., Osman, A.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55987
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55987
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spelling	sg-nus-scholar.10635-559872023-11-01T07:05:06Z Fabrication of large-area ultra-thin single crystal silicon membranes Dang, Z.Y. Motapothula, M. Ow, Y.S. Venkatesan, T. Breese, M.B.H. Rana, M.A. Osman, A. PHYSICS ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.3665620 Applied Physics Letters 99 22 - APPLA 2014-06-17T02:49:24Z 2014-06-17T02:49:24Z 2011-11-28 Article Dang, Z.Y., Motapothula, M., Ow, Y.S., Venkatesan, T., Breese, M.B.H., Rana, M.A., Osman, A. (2011-11-28). Fabrication of large-area ultra-thin single crystal silicon membranes. Applied Physics Letters 99 (22) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3665620 00036951 http://scholarbank.nus.edu.sg/handle/10635/55987 000298244500067 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.3665620
author2	PHYSICS
author_facet	PHYSICS Dang, Z.Y. Motapothula, M. Ow, Y.S. Venkatesan, T. Breese, M.B.H. Rana, M.A. Osman, A.
format	Article
author	Dang, Z.Y. Motapothula, M. Ow, Y.S. Venkatesan, T. Breese, M.B.H. Rana, M.A. Osman, A.
spellingShingle	Dang, Z.Y. Motapothula, M. Ow, Y.S. Venkatesan, T. Breese, M.B.H. Rana, M.A. Osman, A. Fabrication of large-area ultra-thin single crystal silicon membranes
author_sort	Dang, Z.Y.
title	Fabrication of large-area ultra-thin single crystal silicon membranes
title_short	Fabrication of large-area ultra-thin single crystal silicon membranes
title_full	Fabrication of large-area ultra-thin single crystal silicon membranes
title_fullStr	Fabrication of large-area ultra-thin single crystal silicon membranes
title_full_unstemmed	Fabrication of large-area ultra-thin single crystal silicon membranes
title_sort	fabrication of large-area ultra-thin single crystal silicon membranes
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55987
_version_	1781781091726655488

Fabrication of large-area ultra-thin single crystal silicon membranes

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