Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation

10.2961/jlmn.2011.03.0007

Saved in:

Bibliographic Details
Main Authors:	Xie, X.Z., Pan, Z.Y., Wei, X., Huang, F.M., Hu, W., Hong, M.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Hybrid laser micromachining Laser ablation Transparent sapphire
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56231
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-56231
record_format	dspace
spelling	sg-nus-scholar.10635-562312023-10-26T20:12:20Z Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation Xie, X.Z. Pan, Z.Y. Wei, X. Huang, F.M. Hu, W. Hong, M.H. ELECTRICAL & COMPUTER ENGINEERING Hybrid laser micromachining Laser ablation Transparent sapphire 10.2961/jlmn.2011.03.0007 Journal of Laser Micro Nanoengineering 6 3 209-213 2014-06-17T02:52:13Z 2014-06-17T02:52:13Z 2011-12 Article Xie, X.Z., Pan, Z.Y., Wei, X., Huang, F.M., Hu, W., Hong, M.H. (2011-12). Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation. Journal of Laser Micro Nanoengineering 6 (3) : 209-213. ScholarBank@NUS Repository. https://doi.org/10.2961/jlmn.2011.03.0007 18800688 http://scholarbank.nus.edu.sg/handle/10635/56231 000300355900007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Hybrid laser micromachining Laser ablation Transparent sapphire
spellingShingle	Hybrid laser micromachining Laser ablation Transparent sapphire Xie, X.Z. Pan, Z.Y. Wei, X. Huang, F.M. Hu, W. Hong, M.H. Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation
description	10.2961/jlmn.2011.03.0007
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Xie, X.Z. Pan, Z.Y. Wei, X. Huang, F.M. Hu, W. Hong, M.H.
format	Article
author	Xie, X.Z. Pan, Z.Y. Wei, X. Huang, F.M. Hu, W. Hong, M.H.
author_sort	Xie, X.Z.
title	Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation
title_short	Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation
title_full	Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation
title_fullStr	Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation
title_full_unstemmed	Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation
title_sort	hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56231
_version_	1781781132298158080

Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation

Similar Items