Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation

10.2961/jlmn.2011.03.0007

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Bibliographic Details
Main Authors:	Xie, X.Z., Pan, Z.Y., Wei, X., Huang, F.M., Hu, W., Hong, M.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Hybrid laser micromachining Laser ablation Transparent sapphire
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56231
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Institution:	National University of Singapore

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