Hybrid micromachining of transparent sapphire substrate by pulsed green laser irradiation
10.2961/jlmn.2011.03.0007
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Main Authors: | Xie, X.Z., Pan, Z.Y., Wei, X., Huang, F.M., Hu, W., Hong, M.H. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
|
Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/56231 |
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Institution: | National University of Singapore |
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