Multiplexed MPC for multizone thermal processing in semiconductor manufacturing

Multiplexed MPC for multizone thermal processing in semiconductor manufacturing

10.1109/TCST.2009.2036155

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Bibliographic Details
Main Authors: Ling, K.V., Ho, W.K., Wu, B.F., Lo, A., Yan, H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Feed-forward
model predictive control (MPC)
multiplexed
process control
semiconductor manufacturing
temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56730
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Institution: National University of Singapore
id sg-nus-scholar.10635-56730
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spelling sg-nus-scholar.10635-567302023-10-31T07:19:39Z Multiplexed MPC for multizone thermal processing in semiconductor manufacturing Ling, K.V. Ho, W.K. Wu, B.F. Lo, A. Yan, H. ELECTRICAL & COMPUTER ENGINEERING Feed-forward model predictive control (MPC) multiplexed process control semiconductor manufacturing temperature control 10.1109/TCST.2009.2036155 IEEE Transactions on Control Systems Technology 18 6 1371-1380 IETTE 2014-06-17T02:57:57Z 2014-06-17T02:57:57Z 2010-11 Article Ling, K.V., Ho, W.K., Wu, B.F., Lo, A., Yan, H. (2010-11). Multiplexed MPC for multizone thermal processing in semiconductor manufacturing. IEEE Transactions on Control Systems Technology 18 (6) : 1371-1380. ScholarBank@NUS Repository. https://doi.org/10.1109/TCST.2009.2036155 10636536 http://scholarbank.nus.edu.sg/handle/10635/56730 000283450800012 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Feed-forward
model predictive control (MPC)
multiplexed
process control
semiconductor manufacturing
temperature control
spellingShingle Feed-forward
model predictive control (MPC)
multiplexed
process control
semiconductor manufacturing
temperature control
Ling, K.V.
Ho, W.K.
Wu, B.F.
Lo, A.
Yan, H.
Multiplexed MPC for multizone thermal processing in semiconductor manufacturing
description 10.1109/TCST.2009.2036155
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ling, K.V.
Ho, W.K.
Wu, B.F.
Lo, A.
Yan, H.
format Article
author Ling, K.V.
Ho, W.K.
Wu, B.F.
Lo, A.
Yan, H.
author_sort Ling, K.V.
title Multiplexed MPC for multizone thermal processing in semiconductor manufacturing
title_short Multiplexed MPC for multizone thermal processing in semiconductor manufacturing
title_full Multiplexed MPC for multizone thermal processing in semiconductor manufacturing
title_fullStr Multiplexed MPC for multizone thermal processing in semiconductor manufacturing
title_full_unstemmed Multiplexed MPC for multizone thermal processing in semiconductor manufacturing
title_sort multiplexed mpc for multizone thermal processing in semiconductor manufacturing
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/56730
_version_ 1781781263590359040

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