Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation

10.1063/1.1496141

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Bibliographic Details
Main Authors:	Chen, X.Y., Lu, Y.F., Cho, B.J., Zeng, Y.P., Zeng, J.N., Wu, Y.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57001
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-57001
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spelling	sg-nus-scholar.10635-570012024-11-14T15:06:19Z Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation Chen, X.Y. Lu, Y.F. Cho, B.J. Zeng, Y.P. Zeng, J.N. Wu, Y.H. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1496141 Applied Physics Letters 81 7 1344-1346 APPLA 2014-06-17T03:01:07Z 2014-06-17T03:01:07Z 2002-08-12 Article Chen, X.Y., Lu, Y.F., Cho, B.J., Zeng, Y.P., Zeng, J.N., Wu, Y.H. (2002-08-12). Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation. Applied Physics Letters 81 (7) : 1344-1346. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1496141 00036951 http://scholarbank.nus.edu.sg/handle/10635/57001 000177284400064 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1496141
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chen, X.Y. Lu, Y.F. Cho, B.J. Zeng, Y.P. Zeng, J.N. Wu, Y.H.
format	Article
author	Chen, X.Y. Lu, Y.F. Cho, B.J. Zeng, Y.P. Zeng, J.N. Wu, Y.H.
spellingShingle	Chen, X.Y. Lu, Y.F. Cho, B.J. Zeng, Y.P. Zeng, J.N. Wu, Y.H. Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation
author_sort	Chen, X.Y.
title	Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation
title_short	Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation
title_full	Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation
title_fullStr	Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation
title_full_unstemmed	Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation
title_sort	pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57001
_version_	1821200300014305280

Pattern-induced ripple structures at silicon-oxide/silicon interface by excimer laser irradiation

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