Performance-based optical proximity correction methodology
10.1109/TCAD.2009.2032360
Saved in:
| Main Authors: | , , |
|---|---|
| 其他作者: | |
| 格式: | Article |
| 出版: |
2014
|
| 主題: | |
| 在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/57041 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | National University of Singapore |
| id |
sg-nus-scholar.10635-57041 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-570412024-11-14T02:32:20Z Performance-based optical proximity correction methodology Teh, S.-H. Heng, C.-H. Tay, A. ELECTRICAL & COMPUTER ENGINEERING Circuit performance Device performance Lithography Mask design Optical proximity correction (OPC) 10.1109/TCAD.2009.2032360 IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 29 1 51-64 ITCSD 2014-06-17T03:01:33Z 2014-06-17T03:01:33Z 2010-01 Article Teh, S.-H., Heng, C.-H., Tay, A. (2010-01). Performance-based optical proximity correction methodology. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 29 (1) : 51-64. ScholarBank@NUS Repository. https://doi.org/10.1109/TCAD.2009.2032360 02780070 http://scholarbank.nus.edu.sg/handle/10635/57041 000272998400006 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Circuit performance Device performance Lithography Mask design Optical proximity correction (OPC) |
| spellingShingle |
Circuit performance Device performance Lithography Mask design Optical proximity correction (OPC) Teh, S.-H. Heng, C.-H. Tay, A. Performance-based optical proximity correction methodology |
| description |
10.1109/TCAD.2009.2032360 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Teh, S.-H. Heng, C.-H. Tay, A. |
| format |
Article |
| author |
Teh, S.-H. Heng, C.-H. Tay, A. |
| author_sort |
Teh, S.-H. |
| title |
Performance-based optical proximity correction methodology |
| title_short |
Performance-based optical proximity correction methodology |
| title_full |
Performance-based optical proximity correction methodology |
| title_fullStr |
Performance-based optical proximity correction methodology |
| title_full_unstemmed |
Performance-based optical proximity correction methodology |
| title_sort |
performance-based optical proximity correction methodology |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/57041 |
| _version_ |
1821194844984311808 |