Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction

10.1063/1.2006979

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Main Authors:	Wong, K.M., Chim, W.K., Yan, J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57058
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-570582024-11-15T04:23:05Z Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction Wong, K.M. Chim, W.K. Yan, J. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2006979 Applied Physics Letters 87 5 - APPLA 2014-06-17T03:01:46Z 2014-06-17T03:01:46Z 2005 Article Wong, K.M., Chim, W.K., Yan, J. (2005). Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction. Applied Physics Letters 87 (5) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2006979 00036951 http://scholarbank.nus.edu.sg/handle/10635/57058 000230886100065 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.2006979
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wong, K.M. Chim, W.K. Yan, J.
format	Article
author	Wong, K.M. Chim, W.K. Yan, J.
spellingShingle	Wong, K.M. Chim, W.K. Yan, J. Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
author_sort	Wong, K.M.
title	Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
title_short	Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
title_full	Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
title_fullStr	Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
title_full_unstemmed	Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
title_sort	physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57058
_version_	1821234261919793152

Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction

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