Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction

10.1063/1.2753827

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Bibliographic Details
Main Authors: Wong, K.M., Chim, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55510
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Institution: National University of Singapore