Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction
10.1063/1.2753827
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55510 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-55510 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-555102023-10-25T23:12:44Z Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction Wong, K.M. Chim, W.K. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2753827 Applied Physics Letters 91 1 - APPLA 2014-06-17T02:43:55Z 2014-06-17T02:43:55Z 2007 Article Wong, K.M., Chim, W.K. (2007). Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction. Applied Physics Letters 91 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2753827 00036951 http://scholarbank.nus.edu.sg/handle/10635/55510 000247819700079 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.2753827 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Wong, K.M. Chim, W.K. |
| format |
Article |
| author |
Wong, K.M. Chim, W.K. |
| spellingShingle |
Wong, K.M. Chim, W.K. Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction |
| author_sort |
Wong, K.M. |
| title |
Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction |
| title_short |
Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction |
| title_full |
Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction |
| title_fullStr |
Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction |
| title_full_unstemmed |
Deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction |
| title_sort |
deep-depletion physics-based analytical model for scanning capacitance microscopy carrier profile extraction |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55510 |
| _version_ |
1781412141211844608 |