RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing
10.1109/TIM.2007.910097
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sg-nus-scholar.10635-573222023-10-25T23:35:24Z RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing Tan, W.W. Li, R.F.Y. Loh, A.P. Ho, W.K. ELECTRICAL & COMPUTER ENGINEERING In-situ temperature measurement Loop current step response (LCSR) test Measurement accuracy Out-of-contact fault Post-exposure bake (PEB) 10.1109/TIM.2007.910097 IEEE Transactions on Instrumentation and Measurement 57 2 406-412 IEIMA 2014-06-17T03:04:52Z 2014-06-17T03:04:52Z 2008-02 Article Tan, W.W., Li, R.F.Y., Loh, A.P., Ho, W.K. (2008-02). RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing. IEEE Transactions on Instrumentation and Measurement 57 (2) : 406-412. ScholarBank@NUS Repository. https://doi.org/10.1109/TIM.2007.910097 00189456 http://scholarbank.nus.edu.sg/handle/10635/57322 000252338000024 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
In-situ temperature measurement Loop current step response (LCSR) test Measurement accuracy Out-of-contact fault Post-exposure bake (PEB) |
| spellingShingle |
In-situ temperature measurement Loop current step response (LCSR) test Measurement accuracy Out-of-contact fault Post-exposure bake (PEB) Tan, W.W. Li, R.F.Y. Loh, A.P. Ho, W.K. RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing |
| description |
10.1109/TIM.2007.910097 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tan, W.W. Li, R.F.Y. Loh, A.P. Ho, W.K. |
| format |
Article |
| author |
Tan, W.W. Li, R.F.Y. Loh, A.P. Ho, W.K. |
| author_sort |
Tan, W.W. |
| title |
RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing |
| title_short |
RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing |
| title_full |
RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing |
| title_fullStr |
RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing |
| title_full_unstemmed |
RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturing |
| title_sort |
rtd response time estimation in the presence of temperature variations and its application to semiconductor manufacturing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/57322 |
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1781781387925258240 |