Rutherford backscattering analysis of GaN decomposition
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/57323 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-57323 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-573232015-01-06T14:34:41Z Rutherford backscattering analysis of GaN decomposition Choi, H.W. Cheong, M.G. Rana, M.A. Chua, S.J. Osipowicz, T. Pan, J.S. PHYSICS ELECTRICAL & COMPUTER ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 3 1080-1083 JVTBD 2014-06-17T03:04:52Z 2014-06-17T03:04:52Z 2003-05 Article Choi, H.W.,Cheong, M.G.,Rana, M.A.,Chua, S.J.,Osipowicz, T.,Pan, J.S. (2003-05). Rutherford backscattering analysis of GaN decomposition. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 (3) : 1080-1083. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/57323 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Choi, H.W. Cheong, M.G. Rana, M.A. Chua, S.J. Osipowicz, T. Pan, J.S. |
| format |
Article |
| author |
Choi, H.W. Cheong, M.G. Rana, M.A. Chua, S.J. Osipowicz, T. Pan, J.S. |
| spellingShingle |
Choi, H.W. Cheong, M.G. Rana, M.A. Chua, S.J. Osipowicz, T. Pan, J.S. Rutherford backscattering analysis of GaN decomposition |
| author_sort |
Choi, H.W. |
| title |
Rutherford backscattering analysis of GaN decomposition |
| title_short |
Rutherford backscattering analysis of GaN decomposition |
| title_full |
Rutherford backscattering analysis of GaN decomposition |
| title_fullStr |
Rutherford backscattering analysis of GaN decomposition |
| title_full_unstemmed |
Rutherford backscattering analysis of GaN decomposition |
| title_sort |
rutherford backscattering analysis of gan decomposition |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/57323 |
| _version_ |
1681084843679547392 |