Rutherford backscattering analysis of GaN decomposition

• Main Authors: Choi, H.W., Cheong, M.G., Rana, M.A., Chua, S.J., Osipowicz, T., Pan, J.S.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/57323
• Institution: National University of Singapore

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures