Rutherford backscattering analysis of GaN decomposition

Rutherford backscattering analysis of GaN decomposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Bibliographic Details
Main Authors:	Choi, H.W., Cheong, M.G., Rana, M.A., Chua, S.J., Osipowicz, T., Pan, J.S.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57323
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Institution:	National University of Singapore

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