Secondary electron detection for distributed axis electron beam systems

10.1016/j.mee.2008.05.021

Saved in:

Bibliographic Details
Main Authors:	Tanimoto, S., Pickard, D.S., Kenney, C., Pease, R.F.W.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	DIFA DIVA Inspection Lithography Multi-electron-beam system Secondary electron detection
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57343
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-57343
record_format	dspace
spelling	sg-nus-scholar.10635-573432023-10-26T20:22:38Z Secondary electron detection for distributed axis electron beam systems Tanimoto, S. Pickard, D.S. Kenney, C. Pease, R.F.W. ELECTRICAL & COMPUTER ENGINEERING DIFA DIVA Inspection Lithography Multi-electron-beam system Secondary electron detection 10.1016/j.mee.2008.05.021 Microelectronic Engineering 85 8 1786-1791 MIENE 2014-06-17T03:05:06Z 2014-06-17T03:05:06Z 2008-08 Article Tanimoto, S., Pickard, D.S., Kenney, C., Pease, R.F.W. (2008-08). Secondary electron detection for distributed axis electron beam systems. Microelectronic Engineering 85 (8) : 1786-1791. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2008.05.021 01679317 http://scholarbank.nus.edu.sg/handle/10635/57343 000258714000021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	DIFA DIVA Inspection Lithography Multi-electron-beam system Secondary electron detection
spellingShingle	DIFA DIVA Inspection Lithography Multi-electron-beam system Secondary electron detection Tanimoto, S. Pickard, D.S. Kenney, C. Pease, R.F.W. Secondary electron detection for distributed axis electron beam systems
description	10.1016/j.mee.2008.05.021
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tanimoto, S. Pickard, D.S. Kenney, C. Pease, R.F.W.
format	Article
author	Tanimoto, S. Pickard, D.S. Kenney, C. Pease, R.F.W.
author_sort	Tanimoto, S.
title	Secondary electron detection for distributed axis electron beam systems
title_short	Secondary electron detection for distributed axis electron beam systems
title_full	Secondary electron detection for distributed axis electron beam systems
title_fullStr	Secondary electron detection for distributed axis electron beam systems
title_full_unstemmed	Secondary electron detection for distributed axis electron beam systems
title_sort	secondary electron detection for distributed axis electron beam systems
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57343
_version_	1781781391634071552

Secondary electron detection for distributed axis electron beam systems

Similar Items