Secondary electron detection for distributed axis electron beam systems
10.1016/j.mee.2008.05.021
Saved in:
Main Authors: | Tanimoto, S., Pickard, D.S., Kenney, C., Pease, R.F.W. |
---|---|
Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
|
Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/57343 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Demonstration of secondary electron detection using monolithic multi-channel electron detector
by: Tanimoto, S., et al.
Published: (2014) -
Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
by: Pickard, D.S., et al.
Published: (2014) -
Secondary and backscattered electron yields of polymer surface under electron beam irradiation
by: Song, Z.G., et al.
Published: (2014) -
Demonstration of secondary electron detection using monolithic multi-channel electron detector
by: Tanimoto, S., et al.
Published: (2014) -
Parameters and mechanisms governing image contrast in scanning electron microscopy of single-walled carbon nanotubes
by: Wong, W.K., et al.
Published: (2014)