Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM
10.1088/0960-1317/18/8/085019
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2014
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sg-nus-scholar.10635-575432024-11-09T07:24:29Z Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM Shao, L.C. Wong, C.L. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/18/8/085019 Journal of Micromechanics and Microengineering 18 8 - JMMIE 2014-06-17T03:07:22Z 2014-06-17T03:07:22Z 2008-08-01 Article Shao, L.C., Wong, C.L., Palaniapan, M. (2008-08-01). Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM. Journal of Micromechanics and Microengineering 18 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/8/085019 09601317 http://scholarbank.nus.edu.sg/handle/10635/57543 000257891600021 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1088/0960-1317/18/8/085019 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Shao, L.C. Wong, C.L. Palaniapan, M. |
| format |
Article |
| author |
Shao, L.C. Wong, C.L. Palaniapan, M. |
| spellingShingle |
Shao, L.C. Wong, C.L. Palaniapan, M. Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM |
| author_sort |
Shao, L.C. |
| title |
Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM |
| title_short |
Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM |
| title_full |
Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM |
| title_fullStr |
Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM |
| title_full_unstemmed |
Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM |
| title_sort |
study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic sem |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/57543 |
| _version_ |
1821191160164515840 |