Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM
10.1088/0960-1317/18/8/085019
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Main Authors: | Shao, L.C., Wong, C.L., Palaniapan, M. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/57543 |
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Institution: | National University of Singapore |
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