Temperature control and in situ fault detection of wafer warpage

Temperature control and in situ fault detection of wafer warpage

10.1109/TSM.2006.890314

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Bibliographic Details
Main Authors: Ho, W.K., Yap, C., Tay, A., Chen, W., Zhou, Y., Tan, W.W., Chen, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Fault detection
Lithography
Temperature measurement
Wafer warpage
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57602
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Institution: National University of Singapore
id sg-nus-scholar.10635-57602
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spelling sg-nus-scholar.10635-576022023-10-26T21:40:09Z Temperature control and in situ fault detection of wafer warpage Ho, W.K. Yap, C. Tay, A. Chen, W. Zhou, Y. Tan, W.W. Chen, M. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Fault detection Lithography Temperature measurement Wafer warpage 10.1109/TSM.2006.890314 IEEE Transactions on Semiconductor Manufacturing 20 1 1-4 ITSME 2014-06-17T03:08:04Z 2014-06-17T03:08:04Z 2007-02 Article Ho, W.K., Yap, C., Tay, A., Chen, W., Zhou, Y., Tan, W.W., Chen, M. (2007-02). Temperature control and in situ fault detection of wafer warpage. IEEE Transactions on Semiconductor Manufacturing 20 (1) : 1-4. ScholarBank@NUS Repository. https://doi.org/10.1109/TSM.2006.890314 08946507 http://scholarbank.nus.edu.sg/handle/10635/57602 000244191300001 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Fault detection
Lithography
Temperature measurement
Wafer warpage
spellingShingle Fault detection
Lithography
Temperature measurement
Wafer warpage
Ho, W.K.
Yap, C.
Tay, A.
Chen, W.
Zhou, Y.
Tan, W.W.
Chen, M.
Temperature control and in situ fault detection of wafer warpage
description 10.1109/TSM.2006.890314
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ho, W.K.
Yap, C.
Tay, A.
Chen, W.
Zhou, Y.
Tan, W.W.
Chen, M.
format Article
author Ho, W.K.
Yap, C.
Tay, A.
Chen, W.
Zhou, Y.
Tan, W.W.
Chen, M.
author_sort Ho, W.K.
title Temperature control and in situ fault detection of wafer warpage
title_short Temperature control and in situ fault detection of wafer warpage
title_full Temperature control and in situ fault detection of wafer warpage
title_fullStr Temperature control and in situ fault detection of wafer warpage
title_full_unstemmed Temperature control and in situ fault detection of wafer warpage
title_sort temperature control and in situ fault detection of wafer warpage
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/57602
_version_ 1781781443960111104

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