Temperature control and in situ fault detection of wafer warpage

• Main Authors: Ho, W.K., Yap, C., Tay, A., Chen, W., Zhou, Y., Tan, W.W., Chen, M.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Fault detection; Lithography; Temperature measurement; Wafer warpage
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/57602
• Institution: National University of Singapore

10.1109/TSM.2006.890314