Spatially-programmable thermal processing module for 300 mm wafer processing

Spatially-programmable thermal processing module for 300 mm wafer processing

10.1117/12.425238

Saved in:
Bibliographic Details
Main Authors: Tay, A., Khiang Wee Lim, Ai Poh Loh, Woei Wan Tan, Weng Khuen Ho, Huang, A., Fu, J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
300 mm wafer processing
Lithography
Photoresist processing
Temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71836
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/71836

Similar Items