Warpage measurement using projection speckle correlation method and microscopic interferometry

Warpage measurement using projection speckle correlation method and microscopic interferometry

10.1117/12.839252

Saved in:
Bibliographic Details
Main Authors: Sun, W., He, X.Y., Quan, C.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Continuous wavelet transform (CWT)
Newton's ring interferometry
Projection speckle correlation method
Savitzky-golay differential operator
Warpage
Online Access:http://scholarbank.nus.edu.sg/handle/10635/74012
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/74012

Similar Items